Reduced order model compensator control of species transport in a CVD reactor
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Optimal Control Applications and Methods
سال: 2000
ISSN: 0143-2087,1099-1514
DOI: 10.1002/1099-1514(200007/08)21:4<143::aid-oca671>3.3.co;2-p